Tender Details

Country: Germany
Summary: Cd-Sem Measurement System (Ipms-Mrs03.1) - Pr884397-2480-P
DET Ref No: 116400372
Deadline: 17 Apr 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 176775-2025
Purchaser's Detail:
Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details. Login to see full purchaser details.
Login to see details
Description:
1 CD-SEM Measurement System Requirements for top-down measurement of critical dimensions of lines/spaces, holes/columns and other fine features, such as elongated hile/pillar patterns formed on semiconductor wafers during wafer fabrication, using a high-throughput CD-SEM. The system is used for processing MEMS wafers in a CMOS-compatible clean-roam class 10 (approx. ISO 4) production environment. Optional service items: 1.15General requirementsThe system is equipped with an uninterruptible power supply (UPS).Yes 3.3Measurement systemThe traceable certified standard is part of the delivery. The calibrations are not older than 20% of the recommended calibration interval at the time of delivery. Note: A traceable certified standard can be provided by the supplier. Otherwise, Fraunhofer IPMS will provide a VLSI-certified standard.Yes 4.16ProcessThe system is capable of performing 3D measurements using a tilted beam.Yes 4.17ProcessThe system can detect and visualize backscattered electrons (BSE). It is possible to perform CD measurements on the BSE image.Yes 8.2Optional tool featuresPlease provide an offer for a set of consumables (lamps, O-rings, valves, etc.).Yes 8.4Optional tool featuresPlease provide a separate offer for typical spare parts such as axis encoder, laser interferometer, etc.Yes 11.4Extended WarrantyShould offered extended warranty starting from the date on which the statutory warranty expires. An extended warranty of further 12 months should be offered. During t...
Documents:

If you are registered member, kindly login to view full details of this tender notice:

Cd-Sem Measurement System (Ipms-Mrs03.1) - Pr884397-2480-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Cd-Sem Measurement System (Ipms-Mrs03.1) - Pr884397-2480-P. This tender is published on GermanyTenders under DET Ref No: 116400372 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-04-17.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.