Tender Details

Country: Germany
Summary: Drie Etch Cluster (Mainframe + 3 Chambers) (Ipms-Mrs07.1; Ipms-Mrs07.2; Ipms-Mrs08.1; Ipms-Mrs08.2) - Pr882587-2480-P
DET Ref No: 117666162
Deadline: 12 May 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 240460-2025
Purchaser's Detail:
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Description:
1 piece DRIE etch cluster (Mainframe+3 Chambers): MRS07.1: Etching Mainframe MRS07.2: DRIE etching chamber (Chamber1 for deep silicon etching) MRS08.1: Etching module to be integrated into Mainframe MRS07 (chamber 2 for oxide etchuing of thick hardmask MRS08.2: ICP etching module to be integrated into Mainframe MRS07 (chamber 3 for nitride and poly-Si etchung with high selectivity to SiO2) optional service items: 5.7Cassette / Wafer specificationsProcessing of quartz wafer according to above mentioned specsyes/no 7.2Extended WarrantyAn extension of the warranty of further 12 months should be offered. During the warranty period all support, repair and parts cost are free of charge.yes/no 8.7mainframe DRIE-ClusterPreferred lift pin positions (see sheet lift pin positions)"one of the three given configurations yes / no" 12.2Tool AcceptanceThe tool purchase includes a source inspection and process and maintenance training for at least two process engineers and two hardware engineers.yes/no
Doc Title: DRIE etch cluster (Mainframe + 3 Chambers) (IPMS-MRS07.1; IPMS-MRS07.2; IPMS-MRS08.1; IPMS-MRS08.2) - PR882587-2480-P
Contract Type: supplies
Documents:

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Drie Etch Cluster (Mainframe + 3 Chambers) (Ipms-Mrs07.1; Ipms-Mrs07.2; Ipms-Mrs08.1; Ipms-Mrs08.2) - Pr882587-2480-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Drie Etch Cluster (Mainframe + 3 Chambers) (Ipms-Mrs07.1; Ipms-Mrs07.2; Ipms-Mrs08.1; Ipms-Mrs08.2) - Pr882587-2480-P. This tender is published on GermanyTenders under DET Ref No: 117666162 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-05-12.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.