Tender Details

Country: Germany
Summary: I-Line-Stepper-Belichtungssystem (Iisb.Wp4.5) - Pr840232-2790-P
DET Ref No: 129585761
Deadline: 08 Dec 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 734430-2025
Purchaser's Detail:
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Description:
1 piece i-line stepper exposure system A stand-alone i-line stepper exposure system is sought. This is used for structure transfer by selective exposure of UV light-sensitive photoresist systems through a reducing photomask. The UV radiation is to be generated by a mercury vapor lamp or an LED light source. Options: 2.7 Option of front-to-backside adjustment. Please specify the achievable overlay accuracy between the front and backside plane, as well as information on the substrate conditions that enable or restrict the front-to-backside adjustment (e.g., material, wafer thickness, etc.) 2.9 LED as light source or retrofitting the mercury arc lamp source to an LED light source within 10 years after delivery. 3.3 Processing of 100 mm substrates with substrate characteristics listed in 3.3.1 - 3.3.x. The evaluation of the following points is based on the effort required to convert 150 & 200 mm processing ("standard material") to 100 mm wafer processing. The shorter the conversion times, the better. Please provide information on the average duration and effort for conversion. 3.3.1 Automatic handling (including loading and unloading process), alignment (including "Flat Align": Automatic loading with pre-alignment of the wafers and flat alignment 3σ ≤ 10 µm) and processing (first exposure and exposure with prior alignment) for 100 mm substrates with substrate thicknesses of 200 - 1650 µm (± 25 µm) of transparent, semi-transparent, or opaque materials such as glass, silicon carbid...
Documents:

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I-Line-Stepper-Belichtungssystem (Iisb.Wp4.5) - Pr840232-2790-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for I-Line-Stepper-Belichtungssystem (Iisb.Wp4.5) - Pr840232-2790-P. This tender is published on GermanyTenders under DET Ref No: 129585761 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-12-08.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.