Tender Details

Country: Germany
Summary: Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P
DET Ref No: 119084717
Deadline: 12 Jun 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 309996-2025
Purchaser's Detail:
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Description:
1 piece Inline AFM Complete Atomic Force Microscope system for up to 300 mm wafer metrology, consisting of decoupled XY & Z AFM scanners using flexure guided scan system for all three axes: The tool to be purchased for the 300mm cleanroom should be able to be used within the semiconductor production line for rapid characterization of wafers. The focus here is on the parameters of roughness, structure height, widths (critical dimension) and sidewall angles. It should also be possible to carry out a defect review in order to determine their morphological properties. The system must function fully automatically and also be able to record electrical parameters (e.g. capacities from fF ranges to several hundred pF). The handling system and all parts in contact with the wafer must meet the defined contamination levels in order to be able to process the wafers further. optional service items: 2.2.15Warranty extensionPlease offer an extension of the warranty of further 12 months. During the warranty period all support, repair and parts cost are covered and free of charge.please confirm, yes/no 2.2.29General Equipment RequirementsThe AFM must be able to handle smaller probes manually for measurement (e.g. 200mm wafer, pieces of wafer). There has to be an access to the stage area to place the probe manually. A measurement has to be possible by using tool software. No automated handling needs to be done.please specify - yes/no 2.4.7Cassette and wafer specificationsWafer thickness650 µ...
Documents:

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Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Inline Afm (Ipms-Cnt10.1; Ipms-Cnt10.3) - Pr908005-2480-P. This tender is published on GermanyTenders under DET Ref No: 119084717 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-06-12.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.