Tender Details

Country: Germany
Summary: Ion Mill Chamber with Central Handling System and 2 Pvd Chambers (Enas-01.1) - Pr880932-3340-P
DET Ref No: 116670480
Deadline: 22 Apr 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 188863-2025
Purchaser's Detail:
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Description:
1x wafer processing system with a central handling system, 1 chamber for ion beam etching and 1 PVD chamber for in-situ passivation and electrode deposition is being procured. The system is to process 200 mm wafers. The ion beam etching chamber must be suitable for structuring magnetic multilayer stacks (GMR, TMR). Furthermore, this chamber must be equipped with an optical emission spectrometer (OES) for endpoint detection. The PVD chamber is used for the deposition of SiN passivation layers on the GMR/TME structures directly after patterning without vacuum interruption and for the deposition of electrode systems made of noble metals. Optional features: - Replacement set of internal chamber parts (shields / shutters) that need to be cleaned due to coating / particle generation: List the required parts per process chamber; specify the sets per chamber as individual items in the quotation - Additional substrate materials: if possible also quartz
Doc Title: Ion Mill chamber with central handling system and 2 PVD chambers (ENAS-01.1) - PR880932-3340-P
Contract Type: supplies
Documents:

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Ion Mill Chamber with Central Handling System and 2 Pvd Chambers (Enas-01.1) - Pr880932-3340-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Ion Mill Chamber with Central Handling System and 2 Pvd Chambers (Enas-01.1) - Pr880932-3340-P. This tender is published on GermanyTenders under DET Ref No: 116670480 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-04-22.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.