- Country: Germany
- Summary: Laser-Optical System for Large-Scale Generation of Periodic Nano- and Microstructures
- DET Ref No: 90603982
- Deadline: 14 Nov 2023
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 624268-2023
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- Description:
- Laser-optical system for the large-scale generation of periodic nano- and microstructures - Nanolithography system
-Applicable substrate size/wafer size 100mm/4" diameter or more, thickness range from 0.35mm to 3mm or larger area
-Mask system suitable for the applicable wafer size
-Manual or similarthe automatic loading system
-Manual and/or automatic wedge error compensation
-Lateral resolution of 150nm (half lattice constant) or smaller when imaging a linear periodic lattice
-halving the period length of the mask structures when imaging onto the substrate
-exposure timefor complete structuring of a 100mm/4" wafer: 2 minutes or less
-Homogeneity of the power density in the entire exposure field: /- 3% or better
-Nominal wavelength of the exposure source: at least 360nm, at most 390nm
-Camera system for collimation and sample alignment
-Computer withSoftware for system control
Camera system for sample alignment using registration marks (overlay alignment)
Measuring device for monitoring the UV power density, measuring range tailored to the wavelength and power density occurring in the system
Starter package for putting the device into operation
Phase shift photomask passend to the offered system with at least 32 fields consisting of linear gratings with grating constants in the range from 500nm to 2050nm (increment per field: 50nm) or further range for imaging linear gratings with grating constants in the range from 250nm to 1025nm or further range... - Documents:
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CLICK HERE TO LOGINLaser-Optical System for Large-Scale Generation of Periodic Nano- and Microstructures - Germany Tender
The WEST SAXON UNIVERSITY OF ZWICKAU, a Government sector organization in Germany, has announced a new tender for Laser-Optical System for Large-Scale Generation of Periodic Nano- and Microstructures. This tender is published on GermanyTenders under DET Ref No: 90603982 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2023-11-14.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
