Tender Details

Country: Germany
Summary: Los 2: Reactive Ion Etching (Rie) (Izm-22.2)
DET Ref No: 118090045
Deadline: 23 May 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 262931-2025
Purchaser's Detail:
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Description:
Batch 2: Reactive Ion Etching (RIE) (IZM-22.2) Reactive Ion Etching (RIE) finds its application in pretreatment of different kind of surfaces for electroplating, bonding and also to allow a better adhesion of organic films such as polymers and resist, for creating microstructures, etching patterns on wafers and manufacting integreted circuits. It is utilized for precise material removel in a controlled manner. To keep repeatable etching results with high troughput, it is necessary to have seperated processing chambers or better completely seperated tools one for organic and an other for inorganic layer etch processes (or additional metal) in order to avoid any cross-contamination, furthermore filmframe handling should be done in a seperated machine. The uniformity of reactive ion etching with typically gases Ar, SF6, CF4, O2, N2 should be better than ≤5% over a 200mm wafer to enable low process variation and high thickness uniformity which is cruicial for high yield approaches. The system should be able to handle wafers with a diameter of 100 to 200mm without or with minimal efford retrofit and with thicknesses in the range of 300-1200µm. Optional features: - The necessary pumps (preferably from Edwards) and fluid/fluid chiller included in the quote and budget
Doc Title: Los 2: Reactive Ion Etching (RIE) (IZM-22.2)
Contract Type: supplies
Documents:

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Los 2: Reactive Ion Etching (Rie) (Izm-22.2) - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Los 2: Reactive Ion Etching (Rie) (Izm-22.2). This tender is published on GermanyTenders under DET Ref No: 118090045 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-05-23.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.