Tender Details

Country: Germany
Summary: Plasma Oxidation Module (200Mm, Cmos) for Mounting Vapor Deposition Cluster Tool - Pr847550-2270-W
DET Ref No: 111960790
Deadline: 17 Jan 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 775709-2024
Purchaser's Detail:
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Description:
1 plasma oxidation module (200mm, CMOS) for attachment to the vapor deposition cluster tool The plasma oxidation module, attached to a free port of the vapor deposition cluster, enables the precise generation of thin oxide layers (e.g. on Si or Al). The oxidation is plasma-assisted and therefore allows the use of low process temperatures, which is essential for the oxidation of aluminum, for example. Among other things, the production of very thin (Options: 6.3 As an option, a spare parts kit shall be offered according to standard spare parts lists (weekly, monthly, quarterly/semi-annually, annually) for 24/7 operation. The kit should contain all typical spare parts to ensure smooth operation of the system over a period of 24 months 6.4 As an option, a warranty extension of 12 additional months is to be offered 6.8 Additional training courses for operators and process engineers (for at least 3 persons) should be offered as an option 7.5 A separate pre-installation box for all media (vacuum, water, air cooling, exhaust gas, Ethernet, gases, etc.) is to be offered as an option. A compact support center
Doc Title: Plasma oxidation module (200mm, CMOS) for mounting vapor deposition cluster tool - PR847550-2270-W
Contract Type: supplies
Documents:

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Plasma Oxidation Module (200Mm, Cmos) for Mounting Vapor Deposition Cluster Tool - Pr847550-2270-W - Germany Tender

The FRAUNHOFER-GESELLSCHAFT, EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Plasma Oxidation Module (200Mm, Cmos) for Mounting Vapor Deposition Cluster Tool - Pr847550-2270-W. This tender is published on GermanyTenders under DET Ref No: 111960790 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-01-17.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.