Tender Details

Country: Germany
Summary: Pvd Metal System for Qmi Connection (Ipms-Mrs12.1) - Pr926027-2480-P
DET Ref No: 124391193
Deadline: 12 Sep 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: PR926027-2480-P
Purchaser's Detail:
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Description:
1 piece PVD metal system for QMI connection (IPMS-MRS12.1) Equipment for sputtering of AlCu, Al, Ti/TiN and back-etching in independent chambers with planar targets over 200mm wafers. This system is necessary for two process line applications. One application is the deposition of a metal fill inside of TSV for the advanced integration of MEMS chiplets. The second application scenario is the metal system or frontside TSV filling deposition for QMI metalization systems. In both applications the conformal deposition of the barrier is necessary to achieve best contact quality. optional service items: 2.4 Handling System The tool is capable to handle two different sequences simultaneously. yes/no 2.9 Handling System Possibility for edge handling yes/no 3.6 Cassette / Wafer specifications Processing of quartz wafer according to above mentioned specs yes/no 4.5 Process System RF generators with automatic matching network to apply a substrate bias in chamber for all other sputtering chambers "100 - 600 W; yes/no" 4.16 Process System The tool is equipped with a degas station. "Chuck temperature 200C; yes/no" 4.17 Process System The tool is equipped with a wafer buffer station. "wafer quantity in buffer ≥6; yes/no" 4.19 Process System Chuck temperature in process chamber for process "Etching" " 20c; yes/no" 19.6 warranty extension extension of the warranty of further 12 months. yes/no 21.9 uptime / repair / reliability set of consumable parts (lamps, o-rings, valves, etc.) to cover the basic warranty period yes/no
Miscellaneous special-purpose machinery (CPV-Code: 42990000)
PVD metal system for QMI connection (IPMS-MRS12.1) - PR926027-2480-P
Documents:

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Pvd Metal System for Qmi Connection (Ipms-Mrs12.1) - Pr926027-2480-P - Germany Tender

The FRAUNHOFER -GESELLSCHAFT - PURCHASING B12, a Government sector organization in Germany, has announced a new tender for Pvd Metal System for Qmi Connection (Ipms-Mrs12.1) - Pr926027-2480-P. This tender is published on GermanyTenders under DET Ref No: 124391193 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-09-12.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.