Tender Details

Country: Germany
Summary: Single Wafer Ald for Tin (Ipms-Mrs05.1) - Pr896468-2480-P
DET Ref No: 119040781
Deadline: 12 Jun 2025
Financier: Self Financed
Purchaser Ownership: Government
Tender Value: Refer Document
Notice Type: Tender
Document Ref. No.: 307515-2025
Purchaser's Detail:
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Description:
1 piece Single Wafer ALD for TiN A single wafer atomic layer deposition system for TiN as well as for Al2O3 and SiO2 is adressed. The system has to be featured with a remote plasma source either for TiN process or prepearing the surface directly before ALD. This system is necessary for two major process line applications. One application is the deposition of a TiN barrier inside of TSV for the advanced integration of MEMS chiplets. The second application scenario is the Via or frontside TSV liner/barrier deposition for QMI (quasi monolithic integration) metallization systems. In both applications the conformal deposition of the barrier is necessary to achieve best contact quality. It is curcial that only the front side of a wafer is deposited by the film. Additionally the system needs to be capable to provide state-of-the-art dielectric films such as Al2O3 and SiO2. Such system has to be integrated directly into the advanced QMI integration line to prevent contamination, hence mechanical defects and contamination topics are crucial. The system will be installed in a normal cleanroom support structure. optional service items: 02.02Hardware Requirements"Single Wafer or Batch chamber with SiO2 and Al2O3 ALD separated from TiN process chamber "yes / no 04.06Cassette / Wafer specificationsProcessing of quartz wafer according to above mentioned specsyes / no 08.01Process SystemAll pressure gauge connections are equipped with an isolation valve to allow swapping w/o the need to ven...
Documents:

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Single Wafer Ald for Tin (Ipms-Mrs05.1) - Pr896468-2480-P - Germany Tender

The FRAUNHOFER-GESELLSCHAFT - EINKAUF B12, a Government sector organization in Germany, has announced a new tender for Single Wafer Ald for Tin (Ipms-Mrs05.1) - Pr896468-2480-P. This tender is published on GermanyTenders under DET Ref No: 119040781 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-06-12.

The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.