Upgrade of a 200 Mm Wxz Tungsten Cvd Chamber to Wxz Sprint Tender
Notice for Upgrade of a 200 Mm Wxz Tungsten Cvd Chamber to Wxz Sprint Configuration in Germany. The reference ID of the tender is 142700805 and it is closing on 07 Jul 2026.
Tender Details
- Country: Germany
- Summary: Upgrade of a 200 Mm Wxz Tungsten Cvd Chamber to Wxz Sprint Configuration
- DET Ref No: 142700805
- Deadline: 07 Jul 2026
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 386607-2026
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- Description:
- Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration The subject of the procurement is the upgrade of an existing 200 mm tungsten chemical vapor deposition (CVD) system from the manufacturer Applied Materials Inc. (AMAT) to a WxZ Sprint Configuration. This requires, in particular, adjustments to the gas distribution system to implement a pulsed tungsten deposition process as well as the integration of additional hardware to enable deposition pressures of up to 300 Torr. The Services include planning, delivery, integration, commissioning and qualification of the necessary hardware and software adjustments to the existing system system. The subject of the procurement is the upgrade of an existing 200 mm tungsten CVD system from the manufacturer Applied Materials Inc. (AMAT) to a WxZ Sprint configuration. This involves the delivery, integration and commissioning of the required hardware and software components as well as the implementation of all necessary adaptation, testing and Qualification measures required. The scope of services includes, in particular, the modification of the gas distribution system to implement a controlled switching of the process gases WF6 and SiH4 between the exhaust pipe and the process chamber a pulsed tungsten deposition process for high aspect ratio gap fill applications. In addition, additional hardware to enable deposition pressures of up to 300 Torr must be delivered and integrated into the existing...
- Documents:
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CLICK HERE TO LOGINUpgrade of a 200 Mm Wxz Tungsten Cvd Chamber to Wxz Sprint Configuration - Germany Tender
The IHP GMBH - LEIBNIZ INSTITUTE FOR INNOVATIVE MICROELECTRONICS, a Government sector organization in Germany, has announced a new tender for Upgrade of a 200 Mm Wxz Tungsten Cvd Chamber to Wxz Sprint Configuration. This tender is published on GermanyTenders under DET Ref No: 142700805 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2026-07-07.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
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